Leseprobe
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Helium Ion Microscopy
David C. Joy
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Naturwissenschaften, Medizin, Informatik, Technik / Maschinenbau, Fertigungstechnik
Beschreibung
Helium Ion Microscopy: Principles and Applications describes the theory and discusses the practical details of why scanning microscopes using beams of light ions – such as the Helium Ion Microscope (HIM) – are destined to become the imaging tools of choice for the 21st century. Topics covered include the principles, operation, and performance of the Gaseous Field Ion Source (GFIS), and a comparison of the optics of ion and electron beam microscopes including their operating conditions, resolution, and signal-to-noise performance. The physical principles of Ion-Induced Secondary Electron (iSE) generation by ions are discussed, and an extensive database of iSE yields for many elements and compounds as a function of incident ion species and its energy is included. Beam damage and charging are frequently outcomes of ion beam irradiation, and techniques to minimize such problems are presented. In addition to imaging, ions beams can be used for the controlled deposition, or removal, of selected materials with nanometer precision. The techniques and conditions required for nanofabrication are discussed and demonstrated. Finally, the problem of performing chemical microanalysis with ion beams is considered. Low energy ions cannot generate X-ray emissions, so alternative techniques such as Rutherford Backscatter Imaging (RBI) or Secondary Ion Mass Spectrometry (SIMS) are examined.
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HIM charging and damage, Helium ion microscopy how-to, SE and iSE comparison, Helium ion microscopy user guide, Microscopy with ions, history of, Ion –Solid Interactions and Image Formation, Secondary Ion Mass Spectrometry, Ion Generated Damage, Ion Beams, Ion channeling contrast, Ion generated secondary electrons, SE vs. iSE, Helium Ion Microscopy, Sputter Damage, Microanalysis with the HIM, HIM with a GFIS, Patterning and Nanofabrication, HIM, HIM with a GFIS, practical issues, Ion Induced Secondary Electrons, Backscattered ion imaging, Detecting ion beam signals, Scanning Transmission Ion Microscopy, Helium ion microscopy, introduction, Topographic contrast in the HIM, The interaction volume, Ion Beam Induced Charging, Helium ion microscopy operation, Scanning Ion Beam Microscope, Imaging depth of field, HIM, iSE