img Leseprobe Leseprobe

Metal Impurities in Silicon- and Germanium-Based Technologies

Origin, Characterization, Control, and Device Impact

Eddy Simoen, Cor Claeys

PDF
ca. 171,19
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Springer International Publishing img Link Publisher

Naturwissenschaften, Medizin, Informatik, Technik / Maschinenbau, Fertigungstechnik

Beschreibung

This book provides a unique review of various aspects of metallic contamination in Si and Ge-based semiconductors. It discusses all of the important metals including their origin during crystal and/or device manufacturing, their fundamental properties, their characterization techniques and their impact on electrical devices’ performance. Several control and possible gettering approaches are addressed.
 
The book offers a valuable reference guide for all researchers and engineers studying advanced and state-of-the-art micro- and nano-electronic semiconductor devices and circuits. Adopting an interdisciplinary approach, it combines perspectives from e.g. material science, defect engineering, device processing, defect and device characterization, and device physics and engineering.

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Schlagwörter

Semiconductor Device Fabrication, Defect Engineering, Defects and Device Performance, Device Yield Improvement, Metal Precipitation and Segregation, Metal Gettering